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Optical properties of TiO2 thin films prepared by reactive d.c. magnetron sputtering

TiO2 thin films were deposited by reactive d.c magnetron sputtering method on a glass substrate with various ratio of gas flow (Oxygen /Argon) (50/50, 100/50 and 150/50) at substrate temperature 573K. It can be observe that the optical energy gap of TiO2 thin films dependent on the ratio of gas flo...

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Autore principale: Raad M. S. AL-Haddad
Natura: Artigo
Lingua:Inglês
Pubblicazione: University of Baghdad 2012-10-01
Serie:Iraqi Journal of Physics
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Accesso online:https://ijp.uobaghdad.edu.iq/index.php/physics/article/view/749
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