Temperature-Dependent Structural and Electrical Properties of Metal-Organic CVD MoS₂ Films

Metal-Organic CVD method (MOCVD) allows for deposition of ultrathin 2D transition metal dichalcogenides (TMD) films of electronic quality onto wafer-scale substrates. In this work, the effect of temperature on structure, chemical states, and electronic qualities of the MOCVD MoS₂ films we...

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Principais autores:	Roman I. Romanov, Ivan V. Zabrosaev, Anastasia A. Chouprik, Dmitry I. Yakubovsky, Mikhail K. Tatmyshevskiy, Valentyn S. Volkov, Andrey M. Markeev
格式:	Artigo
語言:	Inglês
出版:	MDPI AG 2023-10-01
叢編:	Nanomaterials
主題:	TMD MOCVD nanocrystalline film AFM Raman spectroscopy XPS
在線閱讀:	https://www.mdpi.com/2079-4991/13/19/2712
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