Fabrication of Buried Microchannels with Almost Circular Cross-Section Using HNA Wet Etching
In this paper, a novel fabrication process for the realization of large, suspended microfluidic channels is presented. The method is based on Buried Channel Technology and uses a mixture of HF, HNO<sub>3</sub>, and water etchant, which has high selectivity between the silicon substrate and the silic...
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| Autori principali: | , , , |
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| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
MDPI AG
2024-09-01
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| Serie: | Micromachines |
| Soggetti: | |
| Accesso online: | https://www.mdpi.com/2072-666X/15/10/1230 |
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