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MIS-Like Structures with Silicon-Rich Oxide Films Obtained by HFCVD: Their Response as Photodetectors

MIS-type structures composed of silicon-rich oxide (SRO), thin films deposited by hot filament chemical vapor deposition (HFCVD), show interesting I-V and I-t properties under white light illumination and a response as photodetectors. From electrical measurements, it was found that at a reverse bias...

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Principais autores: Gabriel Omar Mendoza Conde, José Alberto Luna López, Zaira Jocelyn Hernández Simón, José Álvaro David Hernández de la Luz, Godofredo García Salgado, Erick Gastellou Hernández, Haydee Patricia Martínez Hernández, Javier Flores Méndez
פורמט: Artigo
שפה:Inglês
יצא לאור: MDPI AG 2022-05-01
סדרה:Sensors
נושאים:
SRO films
HFCVD
photodetector
responsivity
גישה מקוונת:https://www.mdpi.com/1424-8220/22/10/3904
תגים: הוספת תג
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