Influence of Process Parameters on Properties of Non-Reactive RF Magnetron-Sputtered Indium Tin Oxide Thin Films Used as Electrodes for Organic Light-Emitting Diodes

Indium tin oxide (ITO) is a transparent conductive oxide (TCO) commonly used in the realization of optoelectronic devices needing at least a transparent electrode. In this work, ITO thin films were deposited on glass substrates by non-reactive RF magnetron sputtering, investigating the effects of po...

Ausführliche Beschreibung

Bibliografische Detailangaben

Hauptverfasser:	Claudia Diletto, Fiorita Nunziata, Salvatore Aprano, Ludovico Migliaccio, Maria Grazia Maglione, Alfredo Rubino, Paolo Tassini
Format:	Artigo
Sprache:	Inglês
Veröffentlicht:	MDPI AG 2024-08-01
Schriftenreihe:	Crystals
Schlagworte:	indium tin oxide ITO film RF sputtering OLED electrode
Online-Zugang:	https://www.mdpi.com/2073-4352/14/9/776
Tags:	Tag hinzufügen Keine Tags, Fügen Sie das erste Tag hinzu!