Impact of Hydrogen Plasma on Electrical Properties and Deep Trap Spectra in Ga₂O₃ Polymorphs

In this study, the results of hydrogen plasma treatments of β-Ga₂O₃, α-Ga₂O₃, κ-Ga₂O₃ and γ-Ga₂O₃ polymorphs are analyzed. For all polymorphs, the results strongly suggest an interplay between donor-like hydrogen...

पूर्ण विवरण

ग्रंथसूची विवरण

मुख्य लेखकों:	Alexander Y. Polyakov, Eugene B. Yakimov, Vladimir I. Nikolaev, Alexei I. Pechnikov, Andrej V. Miakonkikh, Alexander Azarov, In-Hwan Lee, Anton A. Vasilev, Anastasiia I. Kochkova, Ivan V. Shchemerov, Andrej Kuznetsov, Stephen J. Pearton
स्वरूप:	Artigo
भाषा:	Inglês
प्रकाशित:	MDPI AG 2023-09-01
श्रृंखला:	Crystals
विषय:	Ga<sub>2</sub>O<sub>3</sub> polymorphs hydrogen plasma deep traps
ऑनलाइन पहुंच:	https://www.mdpi.com/2073-4352/13/9/1400
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