Experiments on MEMS Integration in 0.25 μm CMOS Process
In this paper, we share our practical experience gained during the development of CMOS-MEMS (Complementary Metal-Oxide Semiconductor Micro Electro Mechanical Systems) devices in IHP SG25 technology. The experimental prototyping process is illustrated with examples of three CMOS-MEMS chips and starts...
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| Principais autores: | , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI AG
2018-06-01
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| coleção: | Sensors |
| Assuntos: | |
| Acesso em linha: | http://www.mdpi.com/1424-8220/18/7/2111 |
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