Study on the Influence of Sapphire Crystal Orientation on Its Chemical Mechanical Polishing
Sapphire has been the most widely used substrate material in LEDs, and the demand for non-C-planes crystal is increasing. In this paper, four crystal planes of the A-, C-, M- and R-plane were selected as the research objects. Nanoindentation technology and chemical mechanical polishing technology we...
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| Hauptverfasser: | , , , , , , |
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
MDPI AG
2020-11-01
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| Schriftenreihe: | Applied Sciences |
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| Online-Zugang: | https://www.mdpi.com/2076-3417/10/22/8065 |
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