Improved Performance of Deep Ultraviolet Photodetector From Sputtered Ga<sub>2</sub>O<sub>3</sub> Films Using Post-Thermal Treatments
The metal-semiconductor-metal photodetectors based on the sputtered gallium oxide films on sapphire substrates after various post-thermal treatments have been investigated. The photodetector performance of the furnace-annealed gallium oxide sample degraded with the increase of annealing temperature...
Gardado en:
| Principais autores: | , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
IEEE
2019-01-01
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| Series: | IEEE Photonics Journal |
| Assuntos: | |
| Acceso en liña: | https://ieeexplore.ieee.org/document/8877740/ |
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