Simple and Robust Microfabrication of Polymeric Piezoelectric Resonating MEMS Mass Sensors
Resonating MEMS mass sensors are microdevices with broad applications in fields such as bioscience and biochemistry. Their advantageous surface-to-volume ratio makes their resonant frequency highly sensitive to variations in their mass induced by surface depositions. Recent global challenges, such a...
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| Principais autores: | , |
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| 格式: | Artigo |
| 語言: | Inglês |
| 出版: |
MDPI AG
2022-04-01
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| 叢編: | Sensors |
| 主題: | |
| 在線閱讀: | https://www.mdpi.com/1424-8220/22/8/2994 |
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