Simple and Robust Microfabrication of Polymeric Piezoelectric Resonating MEMS Mass Sensors

Resonating MEMS mass sensors are microdevices with broad applications in fields such as bioscience and biochemistry. Their advantageous surface-to-volume ratio makes their resonant frequency highly sensitive to variations in their mass induced by surface depositions. Recent global challenges, such a...

Ausführliche Beschreibung

Bibliografische Detailangaben

Hauptverfasser:	Chang Ge, Edmond Cretu
Format:	Artigo
Sprache:	Inglês
Veröffentlicht:	MDPI AG 2022-04-01
Schriftenreihe:	Sensors
Schlagworte:	polymeric thin-film MEMS PVDF-TrFE piezoelectric MEMS resonating MEMS mass sensor laser micromachining
Online-Zugang:	https://www.mdpi.com/1424-8220/22/8/2994
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