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A CMOS Compatible Pyroelectric Mid-Infrared Detector Based on Aluminium Nitride

The detection of infrared radiation is of great interest for a wide range of applications, such as absorption sensing in the infrared spectral range. In this work, we present a CMOS compatible pyroelectric detector which was devised as a mid-infrared detector, comprising aluminium nitride (AlN) as t...

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Principais autores: Christian Ranacher, Cristina Consani, Andreas Tortschanoff, Lukas Rauter, Dominik Holzmann, Clement Fleury, Gerald Stocker, Andrea Fant, Herbert Schaunig, Peter Irsigler, Thomas Grille, Bernhard Jakoby
Format: Artigo
Sprog:Inglês
Udgivet: MDPI AG 2019-05-01
Serier:Sensors
Fag:
pyroelectric detector
silicon photonics
mid-infrared detector
Online adgang:https://www.mdpi.com/1424-8220/19/11/2513
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