A CMOS Compatible Pyroelectric Mid-Infrared Detector Based on Aluminium Nitride
The detection of infrared radiation is of great interest for a wide range of applications, such as absorption sensing in the infrared spectral range. In this work, we present a CMOS compatible pyroelectric detector which was devised as a mid-infrared detector, comprising aluminium nitride (AlN) as t...
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| Asıl Yazarlar: | , , , , , , , , , , , |
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| Materyal Türü: | Artigo |
| Dil: | Inglês |
| Baskı/Yayın Bilgisi: |
MDPI AG
2019-05-01
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| Seri Bilgileri: | Sensors |
| Konular: | |
| Online Erişim: | https://www.mdpi.com/1424-8220/19/11/2513 |
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