A Robust Infrared Transducer of an Ultra-Large-Scale Array
A robust micro-electro-mechanical systems (MEMS) infrared thin film transducer of an ultra-large-scale array was proposed and fabricated on a 4-inch silicon wafer. The silicon substrate and micro cavities were introduced. This novel transducer had excellent mechanical stability, time response, and s...
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| Hoofdauteurs: | , , , , , , , |
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| Formaat: | Artigo |
| Taal: | Inglês |
| Gepubliceerd in: |
MDPI AG
2020-11-01
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| Reeks: | Sensors |
| Onderwerpen: | |
| Online toegang: | https://www.mdpi.com/1424-8220/20/23/6807 |
| Tags: |
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