Experimental Investigation of Tip Wear of AFM Monocrystalline Silicon Probes
AFM has a wide range of applications in nanostructure scanning imaging and fabrication. The wear of AFM probes has a significant impact on the accuracy of nanostructure measurement and fabrication, which is particularly significant in the process of nanomachining. Therefore, this paper focuses on th...
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| Autors principals: | , , |
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| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI AG
2023-04-01
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| Col·lecció: | Sensors |
| Matèries: | |
| Accés en línia: | https://www.mdpi.com/1424-8220/23/8/4084 |
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