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Demonstration of Fully Integrable Long-Range Microposition Detection with Wafer-Level Embedded Micromagnets

A fully integrable magnetic microposition detection for miniaturized systems like MEMS devices is demonstrated. Whereas current magnetic solutions are based on the use of hybrid mounted magnets, here a combination of Hall sensors with a novel kind of wafer-level integrable micromagnet is presented....

Whakaahuatanga katoa

I tiakina i:
Ngā taipitopito rārangi puna kōrero
Ngā kaituhi matua: Björn Gojdka, Daniel Cichon, Yannik Lembrecht, Mani Teja Bodduluri, Thomas Lisec, Markus Stahl-Offergeld, Hans-Peter Hohe, Florian Niekiel
Hōputu: Artigo
Reo:Inglês
I whakaputaina: MDPI AG 2022-01-01
Rangatū:Micromachines
Ngā marau:
Urunga tuihono:https://www.mdpi.com/2072-666X/13/2/235
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