FEM Simulation of a High-Performance 128°Y–X LiNbO₃/SiO₂/Si Functional Substrate for Surface Acoustic Wave Gyroscopes

To obtain a high-performance surface acoustic wave (SAW) gyroscope substrate, the propagation characteristics and gyroscopic effect of Rayleigh waves in a 128°Y–X LiNbO₃/SiO₂/Si (LNOI) functional substrate were investigated with a three-dimensional finite element method. The in...

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Autores principales:	Rui Ma, Weiguo Liu, Xueping Sun, Shun Zhou, Dabin Lin
Formato:	Artigo
Lenguaje:	Inglês
Publicado:	MDPI AG 2022-01-01
Colección:	Micromachines
Materias:	surface acoustic wave gyroscope 128°Y–X LiNbO<sub>3</sub>/SiO<sub>2</sub>/Si substrate Rayleigh wave gyroscopic effect finite element simulation
Acceso en línea:	https://www.mdpi.com/2072-666X/13/2/202
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