Mass Spectra Fitting as Diagnostic Tool for Magnetron Plasmas Generated in Ar and Ar/H₂ Gases with Tungsten Targets

In this work, we describe an ion mass spectra processing method from plasmas generated in Ar and Ar/H₂ gases in contact with tungsten surfaces. For this purpose, advanced model functions, i.e., those suitable for fitting the experimental mass peak profiles, are used. In addition, the peak...

Disgrifiad llawn

Manylion Llyfryddiaeth

Prif Awduron:	Cristina Craciun, Silviu Daniel Stoica, Bogdana Maria Mitu, Tomy Acsente, Gheorghe Dinescu
Fformat:	Artigo
Iaith:	Inglês
Cyhoeddwyd:	MDPI AG 2023-07-01
Cyfres:	Molecules
Pynciau:	mass spectrometry tungsten plasma magnetron sputtering
Mynediad Ar-lein:	https://www.mdpi.com/1420-3049/28/15/5664
Tagiau:	Ychwanegu Tag Dim Tagiau, Byddwch y cyntaf i dagio'r cofnod hwn!