MBE‐Grown ScAlN‐on‐Si Films: Enhancing In‐Plane Crystallinity for Extensional Mode BAW Resonators

Abstract Piezoelectric thin films are playing an increasingly important role in micro‐electromechanical systems (MEMS) as the expansion of 5G networks and the rise of Internet of Things (IoT) technologies fuel the need for smaller, more reliable, and energy‐efficient sensors and actuators. Alloying...

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Bibliografische Detailangaben

Hauptverfasser:	Shubham Mondal, Shaurya S. Dabas, Garrett Baucom, Jae Hun Kim, Md Mehedi Hasan Tanim, Kaitian Zhang, Hongping Zhao, Honggyu Kim, Roozbeh Tabrizian, Zetian Mi
Format:	Artigo
Sprache:	Inglês
Veröffentlicht:	Wiley-VCH 2025-11-01
Schriftenreihe:	Advanced Electronic Materials
Schlagworte:	MBE Piezo‐on‐Silicon resonator ScAlN thin‐film
Online-Zugang:	https://doi.org/10.1002/aelm.202500217
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