Crystal-orientation-dependent physical sputtering from four elemental metals

Physical sputtering and its dependence on crystal orientation is well-known, but crystallinity of the target is neither commonly considered in simulations nor when publishing experimental values for its yield. Due to the recent development of detector technology and therefore of crystal orientation...

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Номзүйн дэлгэрэнгүй

Үндсэн зохиолчид:	M. Balden, K. Schlueter, D. Dhard, P. Bauer, R. Nilsson, F. Granberg, K. Nordlund, G. Hobler
Формат:	Artigo
Хэл сонгох:	Inglês
Хэвлэсэн:	Elsevier 2023-12-01
Цуврал:	Nuclear Materials and Energy
Нөхцлүүд:	Physical sputtering yield Crystallinity Electron backscattering diffraction (EBSD) Focused ion beam (FIB) Molecular dynamics (MD) simulations Binary collision approximation (BCA) simulations
Онлайн хандалт:	http://www.sciencedirect.com/science/article/pii/S2352179123001989
Шошгууд:	Шошго нэмэх Шошго байхгүй, Энэхүү баримтыг шошголох эхний хүн болох!