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Properties of Erbium and Ytterbium Doped Gallium Nitride Layers Fabricated by Magnetron Sputtering

We report about some properties of erbium and erbium/ytterbium doped gallium nitride (GaN) layers fabricated by magnetron sputtering on<br />silicon, quartz and Corning glass substrates. For fabricating GaN layers two types of targets were used - gallium in a stainless steel cup and<br />a Ga<sub>2<...

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Principais autores: V. Prajzler, Z. Burian, I. Hüttel, J. Špirková, J. Hamáček, J. Oswald, J. Zavadil, V. Peřina
Formato: Artigo
Idioma:Inglês
Publicado: CTU Central Library 2006-01-01
Series:Acta Polytechnica
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Acceso en liña:https://ojs.cvut.cz/ojs/index.php/ap/article/view/900
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