A Double-Ended Tuning Fork Based Resonant Pressure Micro-Sensor Relying on Electrostatic Excitation and Piezoresistive Detection

This study proposes a microfabricated resonant pressure sensor based on electrostatic excitation and low-impedance piezoresistive detection in which a pair of double-ended tuning forks were utilized as resonators for differential outputs. In operations, targeted pressures deforms the pressure-sensit...

תיאור מלא

מידע ביבליוגרפי

Principais autores:	Xiaoqing Shi, Yulan Lu, Bo Xie, Chao Xiang, Junbo Wang, Deyong Chen, Jian Chen
פורמט:	Artigo
שפה:	Inglês
יצא לאור:	MDPI AG 2018-11-01
סדרה:	Proceedings
נושאים:	double-ended tuning fork resonant pressure micro-sensor electrostatic excitation piezoresistive detection differential resonators
גישה מקוונת:	https://www.mdpi.com/2504-3900/2/13/875
תגים:	הוספת תג אין תגיות, היה/י הראשונ/ה לתייג את הרשומה!