MEMS resonators with electrostatic actuation and piezoresistive readout for sensing applications
MEMS resonators based on internal thermal-piezoresistive amplification are a suitable alternative for sensing applications since they enable high resonance frequencies and high Q-factors. In this work, the principle of operation of this amplification mechanism is modeled, using analytical and lumped...
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| Principais autores: | , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Elsevier
2022-08-01
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| coleção: | Micro and Nano Engineering |
| Assuntos: | |
| Acesso em linha: | http://www.sciencedirect.com/science/article/pii/S2590007222000557 |
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