Recent Advances in Precision Diamond Wheel Dicing Technology

Precision dicing with diamond wheels is a key technology in semiconductor dicing, integrated circuit manufacturing, aerospace, and other fields, owing to its high precision, high efficiency, and broad material applicability. As a critical processing stage, a comprehensive analysis of dicing technolo...

Полное описание

Библиографические подробности

Главные авторы:	Fengjun Chen, Meiling Du, Ming Feng, Rui Bao, Lu Jing, Qiu Hong, Linwei Xiao, Jian Liu
Формат:	Artigo
Язык:	Inglês
Опубликовано:	MDPI AG 2025-10-01
Серии:	Micromachines
Предметы:	dicing process diamond blade control algorithms tool wear process parameters
Online-ссылка:	https://www.mdpi.com/2072-666X/16/10/1188
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