Recent Advances in Precision Diamond Wheel Dicing Technology

Precision dicing with diamond wheels is a key technology in semiconductor dicing, integrated circuit manufacturing, aerospace, and other fields, owing to its high precision, high efficiency, and broad material applicability. As a critical processing stage, a comprehensive analysis of dicing technolo...

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Detalles Bibliográficos

Principais autores:	Fengjun Chen, Meiling Du, Ming Feng, Rui Bao, Lu Jing, Qiu Hong, Linwei Xiao, Jian Liu
Formato:	Artigo
Idioma:	Inglês
Publicado:	MDPI AG 2025-10-01
Series:	Micromachines
Assuntos:	dicing process diamond blade control algorithms tool wear process parameters
Acceso en liña:	https://www.mdpi.com/2072-666X/16/10/1188
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