Development of a MEMS Piezoresistive High-g Accelerometer with a Cross-Center Block Structure and Reliable Electrode
A MEMS piezoresistive sensor for measuring accelerations greater than 100,000 g (about 10<sup>6</sup> m/s<sup>2</sup>) is described in this work. To enhance the performance of the sensor, specifically widening its measurement range and natural frequency, a cross-beam construction with a center block...
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| Hlavní autoři: | , , , |
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| Médium: | Artigo |
| Jazyk: | Inglês |
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MDPI AG
2024-08-01
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| Edice: | Sensors |
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| On-line přístup: | https://www.mdpi.com/1424-8220/24/17/5540 |
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