Development of a MEMS Piezoresistive High-g Accelerometer with a Cross-Center Block Structure and Reliable Electrode
A MEMS piezoresistive sensor for measuring accelerations greater than 100,000 g (about 10<sup>6</sup> m/s<sup>2</sup>) is described in this work. To enhance the performance of the sensor, specifically widening its measurement range and natural frequency, a cross-beam construction with a center block...
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| Autores principales: | , , , |
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| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
MDPI AG
2024-08-01
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| Colección: | Sensors |
| Materias: | |
| Acceso en línea: | https://www.mdpi.com/1424-8220/24/17/5540 |
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