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High linearity AlGaN/GaN HEMTs with Au-free Ti/Al/Ni/Ti ohmic contacts for Ka-band applications

In this study, AlGaN/GaN HEMTs with Au-free Ti/Al/Ni/Ti ohmic contacts were fabricated. The device presents a contact resistance ( R _c ) of 0.64 Ω·mm and high linearity characteristics. The two-tone measurement at 28 GHz shows that the 2 × 50 μ m device exhibits an excellent third-order intercept p...

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Autori principali: Che-Wei Hsu, Yueh-Chin Lin, Shao-Lun Lee, Kai-Wen Chen, Ying-Ciao Chen, Edward Yi Chang
Natura: Artigo
Lingua:Inglês
Pubblicazione: IOP Publishing 2024-01-01
Serie:Applied Physics Express
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Accesso online:https://doi.org/10.35848/1882-0786/ad5949
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