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Transfer-free rapid growth of 2-inch wafer-scale patterned graphene as transparent conductive electrodes and heat spreaders for GaN LEDs

Abstract A technique for the transfer-free growth of 2-inch wafer-scale patterned graphene directly on GaN LED epilayers is introduced. High-quality graphene as transparent electrodes and heat spreaders is synthesized directly on GaN by PECVD at only 600 °C deposition temperature and within 3 min gr...

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Bibliografiske detaljer
Principais autores: Fangzhu Xiong, Jie Sun, Penghao Tang, Weiling Guo, Yibo Dong, Zaifa Du, Shiwei Feng, Xuan Li
Format: Artigo
Sprog:Inglês
Udgivet: Nature Portfolio 2023-10-01
Serier:npj 2D Materials and Applications
Online adgang:https://doi.org/10.1038/s41699-023-00434-9
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