Advanced Atomic Layer Modulation Based Highly Homogeneous PtRu Precious Metals Alloy Thin Films

Abstract Atomic layer modulation (ALM) presents a novel approach for controlling the stoichiometry of platinum‐ruthenium (PtRu) alloys rather than a tedious atomic layer deposition (ALD) supercycling multielement ALD process. This method sequentially pulses dimethyl‐(N,N‐dimethyl‐3‐butene‐1‐amine‐N)...

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主要な著者:	Yeseul Son, Sang Bok Kim, Debananda Mohapatra, Taehoon Cheon, Soo‐Hyun Kim
フォーマット:	Artigo
言語:	Inglês
出版事項:	Wiley 2025-08-01
シリーズ:	Advanced Science
主題:	atomic layer deposition atomic layer modulation homogeneous composition precious metals catalysis PtRu atomic alloy
オンライン･アクセス:	https://doi.org/10.1002/advs.202503561
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