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Two-dimensional laser-induced periodic surface structures formed on crystalline silicon by GHz burst mode femtosecond laser pulses

Femtosecond laser pulses with GHz burst mode that consist of a series of trains of ultrashort laser pulses with a pulse interval of several hundred picoseconds offer distinct features in material processing that cannot be obtained by the conventional irradiation scheme of femtosecond laser pulses (s...

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Bibliografiske detaljer
Principais autores: Shota Kawabata, Shi Bai, Kotaro Obata, Godai Miyaji, Koji Sugioka
Format: Artigo
Sprog:Inglês
Udgivet: IOP Publishing 2023-01-01
Serier:International Journal of Extreme Manufacturing
Fag:
Online adgang:https://doi.org/10.1088/2631-7990/acb133
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