High performance micromachining of sapphire by laser induced plasma assisted ablation (LIPAA) using GHz burst mode femtosecond pulses

GHz burst-mode femtosecond (fs) laser, which emits a series of pulse trains with extremely short intervals of several hundred picoseconds, provides distinct characteristics in materials processing as compared with the conventional irradiation scheme of fs laser (single-pulse mode). In this paper, we...

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Principais autores:	Kotaro Obata, Shota Kawabata, Yasutaka Hanada, Godai Miyaji, Koji Sugioka
Formato:	Artigo
Idioma:	Inglês
Publicado:	Editorial Office of Opto-Electronic Journals, Institute of Optics and Electronics, CAS, China 2024-06-01
Series:	Opto-Electronic Science
Assuntos:	femtosecond laser ghz burst mode ablation lipaa laser induced plasma assisted ablation sapphire
Acceso en liña:	https://www.oejournal.org/article/doi/10.29026/oes.2024.230053
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