Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique
A methanol microsensor integrated with a micro heater manufactured using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technique was presented. The sensor has a capability of detecting low concentration methanol gas. Structure of the sensor is composed of in...
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| Auteurs principaux: | , , |
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| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
MDPI AG
2015-10-01
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| Collection: | Sensors |
| Sujets: | |
| Accès en ligne: | http://www.mdpi.com/1424-8220/15/10/27047 |
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