Optomechanical Gyroscope Based on Micro-Hemispherical Shell and Optical Ring Resonators
Silicon photonic integrated circuits and micro-electro-mechanical systems enable the design of compact, high-performance micro-opto-electro-mechanical systems (MOEMS) gyroscopes, such as recently reported optomechanical gyroscopes. However, effective on-chip light coupling within a confined micro&#x...
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| Principais autores: | , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
IEEE
2024-01-01
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| coleção: | IEEE Photonics Journal |
| Assuntos: | |
| Acesso em linha: | https://ieeexplore.ieee.org/document/10607864/ |
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