Image formation in a multilayer using the extended Nijboer-Zernike theory
We study the image formation by a high-numerical-aperture optical imaging system in the presence of a multilayer structure in the region around the image plane. Earlier references to this subject in the literature use numerical solutions of the diffraction integrals. In this paper, we use a numerica...
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| Hauptverfasser: | , , , |
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
EDP Sciences
2009-01-01
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| Schriftenreihe: | Journal of the European Optical Society-Rapid Publications |
| Schlagworte: | |
| Online-Zugang: | https://jeos.edpsciences.org/articles/jeos/pdf/2009/01/jeos20090409048.pdf |
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