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Image formation in a multilayer using the extended Nijboer-Zernike theory

We study the image formation by a high-numerical-aperture optical imaging system in the presence of a multilayer structure in the region around the image plane. Earlier references to this subject in the literature use numerical solutions of the diffraction integrals. In this paper, we use a numerica...

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Principais autores: Braat J. J. M., van Haver S., Janssen A. J. E. M., Pereira S. F.
Formato: Artigo
Idioma:Inglês
Publicado: EDP Sciences 2009-01-01
Series:Journal of the European Optical Society-Rapid Publications
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Acceso en liña:https://jeos.edpsciences.org/articles/jeos/pdf/2009/01/jeos20090409048.pdf
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