Performance-Enhanced Piezoelectric Micromachined Ultrasonic Transducers by PDMS Acoustic Lens Design

This paper delves into enhancing the performance of ScAlN-based Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) through the implementation of Polydimethylsiloxane (PDMS) acoustic lenses. The PMUT, encapsulated in PDMS, underwent thorough characterization through the utilization of an indu...

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Detalhes bibliográficos

Principais autores:	Licheng Jia, Yong Liang, Fansheng Meng, Guojun Zhang, Renxin Wang, Changde He, Yuhua Yang, Jiangong Cui, Wendong Zhang, Guoqiang Wu
Formato:	Artigo
Idioma:	Inglês
Publicado em:	MDPI AG 2024-06-01
coleção:	Micromachines
Assuntos:	PMUT array PDMS acoustic lenses sensitivity
Acesso em linha:	https://www.mdpi.com/2072-666X/15/6/795
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