Electroacoustic Analysis of a Controlled Damping Planar CMOS-MEMS Electrodynamic Microphone

This paper gives a detailed electroacoustic study of a new generation of monolithic CMOS micromachined electrodynamic microphone, made with standard CMOS technology. The monolithic integration of the mechanical sensor with the electronics using a standard CMOS process is respected in the design, whi...

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Hlavní autoři:	Fares TOUNSI, Brahim MEZGHANI, Libor RUFER, Mohamed MASMOUDI
Médium:	Artigo
Jazyk:	Inglês
Vydáno:	Institute of Fundamental Technological Research Polish Academy of Sciences 2015-10-01
Edice:	Archives of Acoustics
Témata:	MEMS sensor acoustical model monolithic electroacoustic microphone suspended diaphragm lumped element modeling.
On-line přístup:	https://acoustics.ippt.pan.pl/index.php/aa/article/view/1566
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