Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors

The work describes a fast and flexible micro/nano fabrication and manufacturing method for ceramic Micro-electromechanical systems (MEMS)sensors. Rapid prototyping techniques are demonstrated for metal oxide sensor fabrication in the form of a complete MEMS device, which could be used as a compact m...

Бүрэн тодорхойлолт

Номзүйн дэлгэрэнгүй

Үндсэн зохиолчид:	Nikolay Samotaev, Konstantin Oblov, Pavel Dzhumaev, Marco Fritsch, Sindy Mosch, Mykola Vinnichenko, Nikolai Trofimenko, Christoph Baumgärtner, Franz-Martin Fuchs, Lena Wissmeier
Формат:	Artigo
Хэл сонгох:	Inglês
Хэвлэсэн:	MDPI AG 2021-11-01
Цуврал:	Micromachines
Нөхцлүүд:	laser micromachining printing technology platinum ink thin ceramic membrane
Онлайн хандалт:	https://www.mdpi.com/2072-666X/12/12/1440
Шошгууд:	Шошго нэмэх Шошго байхгүй, Энэхүү баримтыг шошголох эхний хүн болох!