Pull-In Voltage and Stress in Fixed-Fixed Beams of RF MEMS Switches

Electrostatically actuated microelectromechanical system (MEMS) switches with fixed- fixed beams were fabricated. FEM modeling was used to calculate the contributions of stress in the fabricated beams from the measured values of pull-in voltage. The reported study provides useful guidelines to optim...

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Номзүйн дэлгэрэнгүй

Үндсэн зохиолчид:	Anna Persano, Girolamo Tagliapietra, Jacopo Iannacci, Alvise Bagolini, Fabio Quaranta, Pietro Siciliano
Формат:	Artigo
Хэл сонгох:	Inglês
Хэвлэсэн:	MDPI AG 2024-04-01
Цуврал:	Proceedings
Нөхцлүүд:	MEMS fixed-fixed beam pull-in voltage residual stress
Онлайн хандалт:	https://www.mdpi.com/2504-3900/97/1/174
Шошгууд:	Шошго нэмэх Шошго байхгүй, Энэхүү баримтыг шошголох эхний хүн болох!