Pull-In Voltage and Stress in Fixed-Fixed Beams of RF MEMS Switches
Electrostatically actuated microelectromechanical system (MEMS) switches with fixed- fixed beams were fabricated. FEM modeling was used to calculate the contributions of stress in the fabricated beams from the measured values of pull-in voltage. The reported study provides useful guidelines to optim...
Tallennettuna:
| Päätekijät: | , , , , , |
|---|---|
| Aineistotyyppi: | Artigo |
| Kieli: | Inglês |
| Julkaistu: |
MDPI AG
2024-04-01
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| Sarja: | Proceedings |
| Aiheet: | |
| Linkit: | https://www.mdpi.com/2504-3900/97/1/174 |
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