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Fabry–Perot Interferometer Used to Measure Very Low Static Pressure Measurements

This paper describes the use of an optical instrument, the Fabry–Perot interferometer, adapted to measure very low pressures. The interferometer consists of two high-reflectance flat mirrors placed one in front of another. In addition, a metallic chamber contains air or a gas. In one of the faces of...

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Principais autores: Sergio Calixto, Roberto Zitzumbo, Zacarías Malacara Hernandez
Format: Artigo
Sprog:Inglês
Udgivet: MDPI AG 2023-07-01
Serier:Sensors
Fag:
sensor devices
pressure sensor
physical sensor
optical sensor
Fabry–Perot interferometer
polydimethyl siloxane
Online adgang:https://www.mdpi.com/1424-8220/23/14/6493
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