Fabry–Perot Interferometer Used to Measure Very Low Static Pressure Measurements

This paper describes the use of an optical instrument, the Fabry–Perot interferometer, adapted to measure very low pressures. The interferometer consists of two high-reflectance flat mirrors placed one in front of another. In addition, a metallic chamber contains air or a gas. In one of the faces of...

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Autores principales:	Sergio Calixto, Roberto Zitzumbo, Zacarías Malacara Hernandez
Formato:	Artigo
Lenguaje:	Inglês
Publicado:	MDPI AG 2023-07-01
Colección:	Sensors
Materias:	sensor devices pressure sensor physical sensor optical sensor Fabry–Perot interferometer polydimethyl siloxane
Acceso en línea:	https://www.mdpi.com/1424-8220/23/14/6493
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