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Lateral Force Calibration Method Used for Calibration of Atomic Force Microscope

Modern heterogeneous micro- and nanostructures usually integrate modules fabricated using various materials and technologies. Moreover, it has to be emphasized that the macro and micro nanoscale material parameters are not the same. For this reason it has become crucial to identify the nanomechanic...

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Principais autores: Magdalena Ekwińska, Zygmunt Rymuza
Format: Artigo
Jezik:Inglês
Izdano: National Institute of Telecommunications 2023-06-01
Serija:Journal of Telecommunications and Information Technology
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Online dostop:https://jtit.pl/jtit/article/view/985
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