Effect of sample thickness on etching rate: Simulations and experiments
Precision optical elements such as computer generated holograms (CGH) for optical testing or optical elements for high-power lasers, e.g., pulse compression gratings, are often many millimeters thick. This study investigates the effect of substrate thickness on dry etching in an inductively coupled...
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| Autors principals: | , , , |
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| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
EDP Sciences
2025-01-01
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| Col·lecció: | Journal of the European Optical Society-Rapid Publications |
| Matèries: | |
| Accés en línia: | https://jeos.edpsciences.org/articles/jeos/full_html/2025/02/jeos20250075/jeos20250075.html |
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