Effect of sample thickness on etching rate: Simulations and experiments
Precision optical elements such as computer generated holograms (CGH) for optical testing or optical elements for high-power lasers, e.g., pulse compression gratings, are often many millimeters thick. This study investigates the effect of substrate thickness on dry etching in an inductively coupled...
Gorde:
| Egile Nagusiak: | , , , |
|---|---|
| Formatua: | Artigo |
| Hizkuntza: | Inglês |
| Argitaratua: |
EDP Sciences
2025-01-01
|
| Saila: | Journal of the European Optical Society-Rapid Publications |
| Gaiak: | |
| Sarrera elektronikoa: | https://jeos.edpsciences.org/articles/jeos/full_html/2025/02/jeos20250075/jeos20250075.html |
| Etiketak: |
Etiketarik gabe, Izan zaitez lehena erregistro honi etiketa jartzen!
|