Mixed-Defect Wafer Map Classification Using CapsNet-Based Models With Precise Scratch-Pattern Reconstruction

Wafer maps of large-scale integration chips are matrices showing the defective chip position on a wafer. Determining defect patterns on wafer maps is crucial because these patterns indicate the root cause of defects in the manufacturing process. Convolutional neural networks can successfully extract...

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Autors principals:	Yoshikazu Nagamura, Yuki Yamanaka, Itsuki Fujita, Masayuki Arai, Satoshi Fukumoto
Format:	Artigo
Idioma:	Inglês
Publicat:	IEEE 2025-01-01
Col·lecció:	IEEE Access
Matèries:	CapsNet classification decoder defect pattern scratch wafer map
Accés en línia:	https://ieeexplore.ieee.org/document/11202899/
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