An automated AFM for nanoindentation and force related measurements
A fully automated atomic force microscope（AFM）is presented.The mechanical motion of the AFM stage was controlled by three steppers.The fine motion of the AFM was controlled by an MCL one-axis piezo plate.A 32.768 kHz crystal tuning fork（TF）was used as the transducer with a probe attached.An acoustic...
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| Autores principales: | , |
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| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
Publishing Center of North University of China
2018-01-01
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| Colección: | Journal of Measurement Science and Instrumentation |
| Materias: | |
| Acceso en línea: | http://jmsi.publish.founderss.cn/thesisDetails?columnId=46028868&Fpath=home&index=0 |
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