An automated AFM for nanoindentation and force related measurements
A fully automated atomic force microscope(AFM)is presented.The mechanical motion of the AFM stage was controlled by three steppers.The fine motion of the AFM was controlled by an MCL one-axis piezo plate.A 32.768 kHz crystal tuning fork(TF)was used as the transducer with a probe attached.An acoustic...
Gorde:
| Egile Nagusiak: | , |
|---|---|
| Formatua: | Artigo |
| Hizkuntza: | Inglês |
| Argitaratua: |
Publishing Center of North University of China
2018-01-01
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| Saila: | Journal of Measurement Science and Instrumentation |
| Gaiak: | |
| Sarrera elektronikoa: | http://jmsi.publish.founderss.cn/thesisDetails?columnId=46028868&Fpath=home&index=0 |
| Etiketak: |
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