The Design of a Low Power MEMS Based Micro-hotplate Device Using a Novel Nickel Alloy for Gas Sensing Applications
In this paper comparative analysis of MEMS (Micro-electro-mechanical System) based Micro-hotplate using three different heating elements use as separately are presented. Three different materials (viz. DilverP1, Polysilicon, and Platinum) are used as heating elements with same thickness of 0.2 µm. C...
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| Principais autores: | , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Sumy State University
2014-04-01
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| coleção: | Журнал нано- та електронної фізики |
| Assuntos: | |
| Acesso em linha: | http://jnep.sumdu.edu.ua/download/numbers/2014/1/articles/jnep_2014_V6_01004.pdf |
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